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Lab Instruments
DuPont Performance Polymers Kalrez® 9500 Fluoroelastomer
Categories: Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)

Material Notes: DuPont™ Kalrez® 9500 perfluoroelastomer parts are a tan product for Deposition, Ash/Strip and Conductor (Poly/Metal) Etch processes. It has been specifically designed for use in applications where ozone is used for processing, e.g. SACVD, PECVD ultra-low K (BLOK™), and where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. Kalrez® 9500 exhibits excellent resistance to CVD and ash/strip process chemistry, i.e., ozone, ammonia and water vapor. It also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 310 °C is suggested. Kalrez® 9500 can also withstand short-term excursions up to 325 °C. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9500 parts.

Features/Benefits

  • Excellent resistance to CVD and ash/strip process chemistry (ozone, ammonia, water vapor, etc.)
  • Low erosion rate and ultra-low particle generation in radical dominant oxygen and fluorine-based plasmas
  • Excellent thermal stability
  • Very low outgassing and metals content
  • Excellent mechanical strength

Suggested Applications

  • Gas inlet/orifice/mixing block seals
  • Chamber lid seals
  • Isolation valve seals
  • Bonded gate valves/slit valve door seals

DuPont and Dow have completed their merger but further transactions/spinoffs are planned.

Vendors:
Available Properties
  • Density, ISO 1183
  • Hardness, Shore A, ASTM D 2240
  • Elongation at Break, ASTM D 412
  • 100% Modulus, ASTM D 412
  • CTE, linear, ISO 11359-1/-2
  • Maximum Service Temperature, Air, DuPont proprietary test
  
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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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Elmet Technologies
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