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Lab Instruments
DuPont Performance Polymers Kalrez® 9100 Fluoroelastomer
Categories: Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)

Material Notes: DuPont™ Kalrez® 9100 perfluoroelastomers parts are an amber translucent product for PV cell manufacturing processes requiring resistance to fluorine-based plasma including amorphous/microcrystalline silicon thin film deposition. It exhibits very low weight loss and ultra-low particle generation in fluorine-based plasma, e.g., NF3, F2, etc. It also offers excellent resistance to dry process chemistry and has excellent thermal stability, compression set and outgassing properties. Kalrez® 9100 has good mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300 °C is suggested.

Features/Benefits

  • Very low weight loss and ultra-low particle generation in fluorine-based plasma
  • Excellent resistance to dry process chemistry
  • Excellent thermal stability
  • Excellent (low) compression set and outgassing properties

Suggested Applications

  • Gas valve/slit valve door seals
  • Gas inlet/orifice seals
  • Isolation valve seals
  • Substrate handling pads
  • Chamber lid seals

DuPont and Dow have completed their merger but further transactions/spinoffs are planned.

Vendors:
Available Properties
  • Hardness, Shore A, ASTM D 2240
  • Elongation at Break, ASTM D 412
  • 100% Modulus, ASTM D 412
  • CTE, linear, ISO 11359-1/-2
  • Maximum Service Temperature, Air, DuPont proprietary test
  • Minimum Service Temperature, Air, ASTM D 1329, Retraction temperature TR-10
  
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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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Elmet Technologies
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