DuPont Mobility and Materials Kalrez® 9100 Fluoroelastomer

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DuPont Mobility and Materials Kalrez® 9100 Fluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	DuPont™ Kalrez® 9100 perfluoroelastomers parts are an amber translucent product for PV cell manufacturing processes requiring resistance to fluorine-based plasma including amorphous/microcrystalline silicon thin film deposition. It exhibits very low weight loss and ultra-low particle generation in fluorine-based plasma, e.g., NF3, F2, etc. It also offers excellent resistance to dry process chemistry and has excellent thermal stability, compression set and outgassing properties. Kalrez® 9100 has good mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300 °C is suggested. Features/Benefits Very low weight loss and ultra-low particle generation in fluorine-based plasma Excellent resistance to dry process chemistry Excellent thermal stability Excellent (low) compression set and outgassing properties Suggested Applications Gas valve/slit valve door seals Gas inlet/orifice seals Isolation valve seals Substrate handling pads Chamber lid seals Information provided by DuPont
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Available Properties
Hardness, Shore A, ASTM D 2240 Elongation at Break, ASTM D 412 100% Modulus, ASTM D 412 CTE, linear, ISO 11359-1/-2 Maximum Service Temperature, Air, DuPont proprietary test Minimum Service Temperature, Air, ASTM D 1329, Retraction temperature TR-10

Property Data

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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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