| DuPont™ Kalrez® 9100 perfluoroelastomers parts are an amber translucent product for PV cell manufacturing processes requiring resistance to fluorine-based plasma including amorphous/microcrystalline silicon thin film deposition. It exhibits very low weight loss and ultra-low particle generation in fluorine-based plasma, e.g., NF3, F2, etc. It also offers excellent resistance to dry process chemistry and has excellent thermal stability, compression set and outgassing properties. Kalrez® 9100 has good mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300 °C is suggested. Features/Benefits - Very low weight loss and ultra-low particle generation in fluorine-based plasma
- Excellent resistance to dry process chemistry
- Excellent thermal stability
- Excellent (low) compression set and outgassing properties
Suggested Applications - Gas valve/slit valve door seals
- Gas inlet/orifice seals
- Isolation valve seals
- Substrate handling pads
- Chamber lid seals
Information provided by DuPont |
