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Master Bond adhesives

Tosoh NP Semiconductor high-purity grade, Fused Silica Glass
Categories: Ceramic; Glass

Material Notes: Tosoh N and NP materials are manufactured by fusing a high-purity silica powder using Tosoh's proprietary oxy-hydrogen flame fusion process. Thanks to its high purity, low aluminum content, and extremely low level of bubbles and inclusions, N has become the reference material for a broad range of applications, such as semiconductor manufacturing, metrology, optics, chemical processing, UV and high temperature windows. In particular, N is an enabling material for stringent plasma etch processes used in leading-edge semiconductor manufacturing. NP is an enhanced version of N material, with further reduced alkali content for use in processes that require extreme contamination control. Available in up to 1,200mm square and 580 mm round ingots, N and NP materials are 450mm wafer ready.

Information provided by Tosh Corporation

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Physical PropertiesMetricEnglishComments
Density 2.20 g/cc0.0795 lb/in³
Viscosity 12700 cP
@Temperature 1200 °C
12700 cP
@Temperature 2190 °F
 
Mechanical PropertiesMetricEnglishComments
Hardness, Vickers 907.5907.5
Tensile Strength 50.0 MPa7250 psi
Modulus of Elasticity 74.0 GPa10700 ksiYoung's
Flexural Strength 65.0 - 95.0 MPa9430 - 13800 psi
Compressive Strength 1.13 MPa164 psi
Poissons Ratio 0.170.17
Shear Modulus 31.0 GPa4500 ksi
Torsional Stiffness 29.0 MPa4210 psi
 
Electrical PropertiesMetricEnglishComments
Volume Resistivity 5.00e+16 ohm-cm5.00e+16 ohm-cm
Surface Resistance 3.00e+15 ohm3.00e+15 ohm
Dielectric Constant 3.9
@Frequency 5.00e+8 Hz
3.9
@Frequency 5.00e+8 Hz
Dielectric Strength 32.0 kV/mm
@Frequency 50 Hz
813 kV/in
@Frequency 50 Hz
Dielectric Loss Index <= 1.0
@Frequency 5.00e+8 Hz
<= 1.0
@Frequency 5.00e+8 Hz
 
Thermal PropertiesMetricEnglishComments
CTE, linear 0.570 µm/m-°C
@Temperature 30.0 - 600 °C
0.317 µin/in-°F
@Temperature 86.0 - 1110 °F
Specific Heat Capacity 0.749 J/g-°C0.179 BTU/lb-°F
Thermal Conductivity 1.38 W/m-K9.58 BTU-in/hr-ft²-°F
Softening Point 1720 °C3130 °F(?=107.6)*2
Annealing Point 1180 °C2160 °F(?=1013)
Strain Point 1080 °C1980 °F(?=1014.5)
 
Descriptive Properties
Chemical Properties? 0.01ppmCu
 0.04 ppmMg
 0.05 ppmK
 0.05 ppmLi
 0.12 ppmFe
 0.14 ppmNa
 0.6 ppmCa
 270 ppmOH
 8.1 ppmAl

Some of the values displayed above may have been converted from their original units and/or rounded in order to display the information in a consistent format. Users requiring more precise data for scientific or engineering calculations can click on the property value to see the original value as well as raw conversions to equivalent units. We advise that you only use the original value or one of its raw conversions in your calculations to minimize rounding error. We also ask that you refer to MatWeb's terms of use regarding this information. Click here to view all the property values for this datasheet as they were originally entered into MatWeb.

PTOSOH007 / 306465

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