Tosoh NP Semiconductor high-purity grade, Fused Silica Glass

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Tosoh NP Semiconductor high-purity grade, Fused Silica Glass
Categories:	Ceramic; Glass
Material Notes:	Tosoh N and NP materials are manufactured by fusing a high-purity silica powder using Tosoh's proprietary oxy-hydrogen flame fusion process. Thanks to its high purity, low aluminum content, and extremely low level of bubbles and inclusions, N has become the reference material for a broad range of applications, such as semiconductor manufacturing, metrology, optics, chemical processing, UV and high temperature windows. In particular, N is an enabling material for stringent plasma etch processes used in leading-edge semiconductor manufacturing. NP is an enhanced version of N material, with further reduced alkali content for use in processes that require extreme contamination control. Available in up to 1,200mm square and 580 mm round ingots, N and NP materials are 450mm wafer ready. Information provided by Tosh Corporation
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Physical Properties	Original Value	Comments

Density	2.20 g/cc
Viscosity	12700 cP @Temperature 1200 °C

Mechanical Properties	Original Value	Comments
Hardness, Vickers	907.5
Tensile Strength	50.0 MPa
Modulus of Elasticity	74.0 GPa	Young's
Flexural Strength	65.0 - 95.0 MPa
Compressive Strength	1.13 MPa
Poissons Ratio	0.17
Shear Modulus	31.0 GPa
Torsional Stiffness	29.0 MPa

Electrical Properties	Original Value	Comments
Volume Resistivity	5.00e+16 ohm-cm
Surface Resistance	3.00e+15 ohm
Dielectric Constant	3.9 @Frequency 5.00e+8 Hz
Dielectric Strength	32.0 kV/mm @Frequency 50 Hz
Dielectric Loss Index	<= 1.0 @Frequency 5.00e+8 Hz

Thermal Properties	Original Value	Comments
CTE, linear	0.570 µm/m-°C @Temperature 30.0 - 600 °C
Specific Heat Capacity	0.749 J/g-°C
Thermal Conductivity	1.38 W/m-K
Softening Point	1720 °C	(?=107.6)*2
Annealing Point	1180 °C	(?=1013)
Strain Point	1080 °C	(?=1014.5)

Descriptive Properties
Chemical Properties	? 0.01ppm	Cu
	0.04 ppm	Mg
	0.05 ppm	K
	0.05 ppm	Li
	0.12 ppm	Fe
	0.14 ppm	Na
	0.6 ppm	Ca
	270 ppm	OH
	8.1 ppm	Al

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PTOSOH007 / 306465

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