Saint-Gobain Spectrosil® 2200 Optical Fused Quartz

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Saint-Gobain Spectrosil® 2200 Optical Fused Quartz
Categories:	Ceramic; Glass; Oxide; Silicon Oxide
Material Notes:	Spectrosil® 2200 grade is an excimer laser grade developed for maximum transmission and prolonged life in microlithography and other critical deep UV applications using KrF (248 nm) and ArF (193 nm) excimer lasers. Spectrosil® is a synthetic fused silica manufactured using a patented, environmentally friendly process that results in a virtually chlorine-free material of exceptional purity which is bubble-free and fluorescence-free. The 2000 series has excellent optical transmission from 180 nm in the deep UV through to 2000 nm in the IR Available in ingot, rod, tube, and components. General properties of Fused Silica and Fused quartz: A very wide transmission range from UV to near IR; extremely high optical transmission, excellent resistance to high power laser energy, excellent homogeneity, high temperature resistance, very low thermal expansion (resistance to thermal shock), and chemical inertness. General uses for optical quartz are microlithography optical systems, optical fibers, photomasks, laser optics, LCD displays, light guides, optical, IR , and UV windows, spectrophotometer cells, slides, optical pyrometers, and lamp bodies/components. Information provided by Saint-Gobain Quartz PLC.
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Physical Properties	Metric	English	Comments

Density	2.21 g/cc	0.0798 lb/in³

Mechanical Properties	Metric	English	Comments
Hardness, Knoop	820	820
Vickers Microhardness	1050 - 1350	1050 - 1350	kg/m² Vickers DPH
Hardness, Mohs	7.0	7.0
Modulus of Elasticity	74.0 GPa	10700 ksi
Flexural Strength	50.0 MPa	7250 psi	Bending Strength
Compressive Strength	1100 MPa	160000 psi
Poissons Ratio	0.17	0.17
Shear Modulus	31.0 GPa	4500 ksi

Electrical Properties	Metric	English	Comments
Electrical Resistivity	2.00e+10 ohm-cm @Temperature 800 °C	2.00e+10 ohm-cm @Temperature 1470 °F
Dielectric Constant	3.78 @Frequency 100 - 2.50e+10 Hz	3.78 @Frequency 100 - 2.50e+10 Hz
Dissipation Factor	0.000060 @Frequency 1e+9 Hz	0.000060 @Frequency 1e+9 Hz
	0.00075 @Frequency 1000 Hz	0.00075 @Frequency 1000 Hz

Thermal Properties	Metric	English	Comments
CTE, linear	0.540 µm/m-°C @Temperature 0.000 - 1000 °C	0.300 µin/in-°F @Temperature 32.0 - 1830 °F	average
Specific Heat Capacity	0.750 J/g-°C	0.179 BTU/lb-°F
Thermal Conductivity	2.00 W/m-K	13.9 BTU-in/hr-ft²-°F
Maximum Service Temperature, Air	1050 °C	1920 °F	Normal Conditions
	1350 °C	2460 °F	Extended periods if cycles remain above 300°C
	1350 °C	2460 °F
	1650 °C	3000 °F	Quick Immersion
Softening Point	1710 °C	3110 °F	Varies with thermal history
Annealing Point	1100 °C	2010 °F	Varies with thermal history
Strain Point	990 °C	1810 °F	Varies with thermal history

Optical Properties	Metric	English	Comments
Refractive Index	1.457 @Wavelength 632.8 nm	1.457 @Wavelength 632.8 nm	n_He-Ne; Temperature Coefficient = 10.0 ppm/K
	1.4667 @Wavelength 435.83 nm	1.4667 @Wavelength 435.83 nm	n_g; Temperature Coefficient = 10.6 ppm/K
Transmission, Visible	95 %	95 %	Including Fresnel reflection for 10 mm pathlength
UV Transmittance	95 % @Wavelength <=200 nm, Thickness 10.0 mm	95 % @Wavelength <=200 nm, Thickness 0.394 in	Including Fresnel reflection for 10 mm path length.
	>= 99.5 % @Thickness 10.0 mm, Wavelength 193.4 nm	>= 99.5 % @Thickness 0.394 in, Wavelength 193.4 nm
	>= 99.9 % @Thickness 10.0 mm, Wavelength 240 nm	>= 99.9 % @Thickness 0.394 in, Wavelength 240 nm

Component Elements Properties	Metric	English	Comments
SiO2	>= 99.999 %	>= 99.999 %

Descriptive Properties
Bubble Class	0		per DIN 58927
Bubbles; Sum of CSA	< 0.03 mm²/100 cm³
Inclusions	0
Refractive Index Homogeneity	< 10 x 10^-6		Up to 200 mm (ingot/blank)
	< 5 x 10^-6		Up to 100 mm (ingot/blank)
Residual Strain	<5 nm/cm
Striae	3		per MIL-G-174A; Direction Free

Some of the values displayed above may have been converted from their original units and/or rounded in order to display the information in a consistent format. Users requiring more precise data for scientific or engineering calculations can click on the property value to see the original value as well as raw conversions to equivalent units. We advise that you only use the original value or one of its raw conversions in your calculations to minimize rounding error. We also ask that you refer to MatWeb's terms of use regarding this information. Click here to view all the property values for this datasheet as they were originally entered into MatWeb.

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CSTGQZ04 / 2222

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