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Master Bond adhesives

DuPont Mobility and Materials Kalrez® 8002 FFKM Perfluoroelastomer
Categories: Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)

Material Notes: Kalrez® 8002 is a specialty compound targeted specifically for select semiconductor plasma and gas deposition applications. This clear, unfilled compound offers very low particle generation in oxygen and fluorine-based plasmas versus mineral-filled compounds. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength properties and is well suited for both static and low stress/low sealing force applications. A maximum continuous service temperature of 250°C (482°F) is suggested. Ultrapure postcleaning and packaging is standard for parts made from Kalrez® 8002.

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Mechanical PropertiesMetricEnglishComments
Hardness, Shore A 6969ASTM D 2240
Elongation at Break 256 %256 %ASTM D 412
100% Modulus 2.30 MPa334 psiASTM D 412
 
Thermal PropertiesMetricEnglishComments
CTE, linear 395 µm/m-°C219 µin/in-°FISO 11359-1/-2
Maximum Service Temperature, Air 275 °C527 °FDuPont proprietary test
Minimum Service Temperature, Air 1.00 °C33.8 °FRetraction temperature TR-10; ASTM D 1329
 
Descriptive Properties
ColorClear
Polymer(FFKM)

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PDVD057 / 33876

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