| DuPont™ Kalrez® 9500 perfluoroelastomer parts are a tan product for Deposition, Ash/Strip and Conductor (Poly/Metal) Etch processes. It has been specifically designed for use in applications where ozone is used for processing, e.g. SACVD, PECVD ultra-low K (BLOK™), and where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. Kalrez® 9500 exhibits excellent resistance to CVD and ash/strip process chemistry, i.e., ozone, ammonia and water vapor. It also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 310 °C is suggested. Kalrez® 9500 can also withstand short-term excursions up to 325 °C. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9500 parts. Features/Benefits - Excellent resistance to CVD and ash/strip process chemistry (ozone, ammonia, water vapor, etc.)
- Low erosion rate and ultra-low particle generation in radical dominant oxygen and fluorine-based plasmas
- Excellent thermal stability
- Very low outgassing and metals content
- Excellent mechanical strength
Suggested Applications - Gas inlet/orifice/mixing block seals
- Chamber lid seals
- Isolation valve seals
- Bonded gate valves/slit valve door seals
Information provided by DuPont |
