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Lab Instruments
DuPont Performance Polymers Kalrez® 9300 Fluoroelastomer
Categories: Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)

Material Notes: DuPont™ Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions (“physical”) and radicals (“chemical”), i.e., where a balance of “physical” and “chemical” plasma erosion resistance is typically required. Kalrez® 9300 exhibits excellent resistance to oxygen and fluorine-based plasma and etch process chemistry. It also offers very low metals content, excellent thermal stability and mechanical strength, and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9300 parts.

Features/Benefits:

  • Low erosion rate and ultra-low particle generation in ion/radical dominant oxygen and fluorine-based plasmas
  • Excellent resistance to etch process chemistry
  • Very low metals content
  • Excellent thermal stability
  • Excellent mechanical strength

Suggested Applications

  • Gas inlet/orifice seals
  • Chamber lid seals
  • Isolation valve seals
  • Bonded gate valves/slit valve door seals

DuPont and Dow have completed their merger but further transactions/spinoffs are planned.

Vendors:
Available Properties
  • Density, ISO 1183
  • Hardness, Shore A, ASTM D 2240
  • Elongation at Break, ASTM D 412
  • 100% Modulus, ASTM D 412
  • CTE, linear, ISO 11359-1/-2
  • Maximum Service Temperature, Air, DuPont proprietary test
  
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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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Elmet Technologies
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