DuPont Mobility and Materials Kalrez® 9300 Fluoroelastomer

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DuPont Mobility and Materials Kalrez® 9300 Fluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	DuPont™ Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions (“physical”) and radicals (“chemical”), i.e., where a balance of “physical” and “chemical” plasma erosion resistance is typically required. Kalrez® 9300 exhibits excellent resistance to oxygen and fluorine-based plasma and etch process chemistry. It also offers very low metals content, excellent thermal stability and mechanical strength, and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9300 parts. Features/Benefits: Low erosion rate and ultra-low particle generation in ion/radical dominant oxygen and fluorine-based plasmas Excellent resistance to etch process chemistry Very low metals content Excellent thermal stability Excellent mechanical strength Suggested Applications Gas inlet/orifice seals Chamber lid seals Isolation valve seals Bonded gate valves/slit valve door seals Information provided by DuPont
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Available Properties
Density, ISO 1183 Hardness, Shore A, ASTM D 2240 Elongation at Break, ASTM D 412 100% Modulus, ASTM D 412 CTE, linear, ISO 11359-1/-2 Maximum Service Temperature, Air, DuPont proprietary test

Property Data

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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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