| Spectral range 365-400 nm, +/- 0.5% Accompanying optical glasses with high UV-transmittance at 365 nm (i-line wavelength) and high refractive index homogeneity, SCHOTT offers narrow bandpass filters for Applications in i-line wafer steppers. With the help of coating material development and high Purity raw materials, SCHOTT is able to provide high transmission filters with extraordinary radiation resistance. The requirements which are addressed to i-line interference filters are translated into a customized design. The filter is coated with various layers and this tailored multilayer system is characterized with an outstanding transmission at 365 nm combined with a narrow spectral bandwidth and very good homogeneity of the spectral behavior throughout the usable filter area. Accompanied with long product life the obtained components are filters from SCHOTT, which are the materials of choice for various applications in the UV spectral region. Information provided by SCHOTT. |
