Greene Tweed CHEMRAZ® 629 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 629 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 629 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz 629 is developed from an advanced polymer utilizing fluoro-polymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) with challenging gland designs and reduced sealing loads. Chemraz 629 remains stable at service temperatures up to 260°C (500°F). Applications: Endpoint windows Bell jar seals Valve seals KF fitting seals Window seals Isolator valve seals Lid seals Gas inlet seals Slit valve seals Chamber seals Information provided by Greene Tweed.
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Available Properties
Specific Gravity, ASTM D297 Hardness, Shore A, ASTM D2240 Tensile Strength at Break, ASTM D1414 Tensile Strength, Yield, ASTM D1414, @50% Elongation Tensile Strength, Yield, ASTM D1414, @100% Elongation Elongation at Break, ASTM D1414 Compression Set, ASTM D395, At 25% deflection Maximum Service Temperature, Air Minimum Service Temperature, Air

Property Data

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Category Notes
Plastic

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