ES ingots are manufactured from high-purity SiCl4 using an oxy-hydrogen flame in a verneuil type process. For very large parts, such as LCD photomasks, ES ingots are reflown into large rectangular blocks. ES ingots have a typical purity that exceeds the detection limit of 10ppb in all elements, and are virtually free of bubbles and inclusions. As a result, ES is the material of choice for LCD photomasks up to Gen. 10, and selected subgrades are widely used in leading edge stepper (KrF and ArF) and optics applications. Features: Standard optical grade for planar optics Application: : LCD Mask, Mirror & window substrate Information provided by Tosh Corporation |