Molecular Formula: C9H6O6 IUPAC Name: 4,10-dioxatricyclo[6.3.0.02,6]undecane-3,5,9,11-tetrone SMILES: C1C2C(C3C1C(=O)OC3=O)C(=O)OC2=O InChI=1S/C9H6O6/c10-6-2-1-3-5(4(2)8(12)14-6)9(13)15-7(3)11/h2-5H,1H2; InChiKey = NLWBEORDOPDUPM-UHFFFAOYSA-N Alfa Chemistry Materials product group: Semiconductor Manufacturer data sheet |