Greene Tweed CHEMRAZ® 640 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 640 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 640 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wager processing yields. Chemraz 640 is recommended for both static and dynamics, wet and dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) Chemraz 640 remains stable at service temperatures up to 554°F (290°C). Applications: Endpoint windows Valve seals Isolator valve seals Lid seals Gas inlet/outlet seals Slit valve seals Chamber seals Gasket seals Dispensing seals Regulator seals Filler seals Information provided by Greene Tweed.
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Available Properties
Specific Gravity, ASTM D297 Hardness, Shore A, ASTM D2240 Tensile Strength at Break, ASTM D1414 Tensile Strength, Yield, ASTM D1414, @50% Elongation Tensile Strength, Yield, ASTM D1414, @100% Elongation Elongation at Break, ASTM D1414 Compression Set, ASTM D395, At 25% deflection Maximum Service Temperature, Air Minimum Service Temperature, Air

Property Data

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Category Notes
Plastic

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