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Elmet Technologies
Honeywell ACCUGLASS® PTTY P-114A Spin-on Glass
Categories: Ceramic; Glass

Material Notes: The ACCUGLASS P-TTY Spin-on Glass (SOG) Series (κ = 4.1-4.3) is a family of phosphosilicate polymers used for metal and poly planarization, overcoat passivation and non-etchback interlayer dielectric in the manufacture of integrated circuits. The ACCUGLASS P-TTY series also provides Na+ gettering ability similar to P-doped CVD oxides. The ACCUGLASS P-TTY series contains 2wt% (P-112A), 2.7wt% (P-112LS) and 4wt% (P-114A) phosphorous bonded to O atoms in the Si-O backbone. The spec-ific formulation results in a stable dielectric constant, <2% within wafer uniformity and can be densified at temperatures up to 700-900°C with no significant loss of phosphorous. Thin films of ACCUGLASS P-TTY are applied using a commercial coater and cured in a vertical or horizontal furnace to thicknesses up to 1000Å (single coat) and 2000Å (double coat). Typically, two coats at ~1,000Å each are applied with hot plate bakes in between coats to achieve optimum planarization.

Benefits

  • Industry proven performance and broad acceptance in subtractive aluminum processing
  • Phosphorus stability up to 900°C
  • Thickness variation within a wafer of less than 2%
  • P-112Ls has similar etch properties as BPSG
Applications:
  • PMD-BPSG Planarization
  • Overcoat Passivation
  • ILD Planarization
  • Available in both Etchback and Non-Etchback
Accuglass P-TTY is suitable for metal and poly planarization, partial and non-etchback applications in a CVD/SOG/CVD sandwich structure. ACCUGLASS P-TTY can also be used for overcoat passivation.

Information provided by Honeywell

Vendors:
Available Properties
  • Tensile Stress
  • Dielectric Constant
  • CTE, linear
  • Refractive Index
  • Shelf Life
  
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