Molecular Formula: C13H16O3Si IUPAC Name: trimethoxy(naphthalen-1-yl)silane SMILES: CO[Si](C1=CC=CC2=CC=CC=C21)(OC)OC InChI=1S/C13H16O3Si/c1-14-17(15-2,16-3)13-10-6-8-11-7-4-5-9-12(11)13/h4-10H,1-3H3; InChiKey = ZSOVVFMGSCDMIF-UHFFFAOYSA-N Alfa Chemistry Materials product group: Semiconductor Manufacturer data sheet |