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Rulon Bearings
Brewer Science ProTEK® B3 Alkaline-Resistant Coating
Categories: Other Engineering Material

Material Notes: ProTEK® B3 coatings thin films are spin-applied polymeric coating systems that provide temporary wet-etch protection for CMOS MEMS circuitry during alkaline or acid etches. ProTEK® B materials offer protection from alkaline solutions such as KOH and TMAH for extended bath etches.
  • Protect delicate front-side circuitry during backside bulk micromachining
  • Increase yield by minimizing front-side damage caused by alkaline etch solution punch-through during wet etching
  • Improve throughput by reducing labor and process time associated with mechanical clamps and increasing the number of wafers per etch bath
The ProTEK® B3 Primer and ProTEK® B3 Protective Coating are applied separately. The film thickness can be varied through adjustment of spin speed. Suggested spin speeds are between 1000 rpm and 4000 rpm.

Information provided by Brewer Science.

Vendors:
Available Properties
  • Thickness, Spin Speed 4000 rpm
  • Thickness, Spin Speed 1000 rpm
  • Shelf Life, Primer
  • Shelf Life, Coating
  
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Ensinger PEI
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