purified by sublimation Molecular Formula: C8H4O6 IUPAC Name: 4,9-dioxatricyclo[5.3.0.02,6]decane-3,5,8,10-tetrone SMILES: C12C(C3C1C(=O)OC3=O)C(=O)OC2=O InChI=1S/C8H4O6/c9-5-1-2(6(10)13-5)4-3(1)7(11)14-8(4)12/h1-4H; InChiKey = YGYCECQIOXZODZ-UHFFFAOYSA-N Alfa Chemistry Materials product group: Semiconductor Manufacturer data sheet |