| Kalrez® Sahara™ 8085 is a new, specialty compound specifically developed for gas deposition applications, i.e., HDPCVD, PECVD, SACVD, etc. It has been specifically formulated for minimal particle generation in NF3 plasma. Sahara™ 8085 exhibits very low particle generation and low weight loss in oxygen and fluorine plasma, has excellent mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate valves, gas inlets, gas orifice seals, gas feedthrough seals, etc.) A maximum continuous service temperature of 240°C is suggested. Kalrez® Sahara™ 8085 can also withstand short-term excursions up to 275°C. Ultrapure post-cleaning and packaging is standard for parts made from Kalrez® Sahara™ 8085. Information provided by manufacturer. |
