| Borosilicate glass manufactured with fire-polished surfaces. It has similar chemical and physical characteristics as the well-known product SCHOTT BOROFLOAT® 33. MEMpax® is available in much lower thicknesses and offers a thin wafer that no longer needs to be ground and polished, thanks to its excellent surface quality. MEMpax® can be used anywhere that extremely thin borosilicate glasses are needed. The coefficient of linear thermal expansion of MEMpax® corresponds with that of silicon, therefore this glass is perfectly suited for use in anodic bonding. Its low autofluorescence, combined with its excellent surface quality, flatness and homogeneity, opens up numerous application possibilities for SCHOTT MEMpax® in MEMS and Biotechnology. Thanks to its low alkali content, MEMpax® acts as a high-quality insulator. For this reason, MEMpax® is an extremely appropriate material for applications that require nonconductive characteristics at high temperatures (up to 450 °C).Information provided by SCHOTT. |
