| Shore scleroscope C-2 hardness is 77. FABMATE is the trade name for a high-strength, finished product that has been purified, machined and subjected to Poco Graphite's proprietary carbon modification treatment. FABMATE products are designed for use in clean rooms. They are ideal for semiconductor applications requiring exceptional cleanliness and a pore-free surface. The graphite substrate is fine-grained, high strength graphite that has excellent machinability. After machining, the surface can be textured if the end product is to be used in thin film deposition. The graphite is next purified and given an amorphous carbon treatment. This treatment is unique because it does more than coat the surface. It also infiltrates and locks onto the graphite. This treatment provides a hard, abrasion resistant surface that produces no particles. The result is a surface that is grain free, harder than the substrate, but extremely thin. This nonporous surface does not allow absorption of acids. FABMATE resists attack by hydrofluoric (HF) and most other acids used in the cleaning process. Information provided by Poco Graphite, Inc. |
