Pyrograph is pyrolytically infiltrated graphite. POCO's proprietary process infiltrates the base material to a minimum depth of 0.1 inch throughout the entire surface of the component. This process seals the graphite surface and reduces particle generation in the chamber.
The manufacturing process begins with a specially formulated graphite. Once a part has been machined, it goes through a purification process that typically results in a purity level of < 2ppm. The final step is a pyrolytic vapor infiltration that produces a hard, uniform surface. Vapor phase processing allows deeper penetration of the pyrolytic carbon into the base material. |
