Chemraz® 656 is a low durometer perfluoroelastomer primarily designed for Bonded Slit Valve gates and special engineered applications such as low sealing forces/tolerance stickups where softer materials aid in the total seal solution. Developed from and advanced polymer utilizing fluoropolymer nano-composite technology particles, Chemraz 656 has very low metallic ion levels and offers resistance to today’s advanced process chemistries. Chemraz 656 is recommended for use in CVD, Etch and diffusion equipment applications. Applications: - Bonded slit valve gates
- Chamber seals
- Window seals
- Gas inlet seals
- Lid seals
Information provided by Greene Tweed. |