Eastman EastaPure™ MAK

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Eastman EastaPure™ MAK
Categories:	Other Engineering Material
Material Notes:	CAS No. 110-43-0 Product Description: Eastman EastaPure™ MAK (Methyl n-Amyl Ketone) is being offered for positive and negative photoresist formulations. It has a minimum assay of 99.0%. It is a high-purity low-trace metal solvent and is tested to measure selected critical trace metals in parts-per-billion levels. EastaPure™ MAK can also be used in edge bead removal process after spin coating. The chemical substances for this product are listed as Inert Ingredients Permitted for Use in Nonfood Use Pesticide Products, and in Food Use Pesticide Products with limitations, under the Federal Insecticide, Fungicide, and Rodenticide Act (FIFRA). Application/Uses: Advanced resist Developers Edge bead removal LED/OLED Microelectronics Negative tone resist Photolithography Photoresist Photoresist stripper applications Positive tone resist Semiconductors Key Attributes: Excellent resin solubility High assay High Purity/Low Trace Metals Inert - Food use with limitations Inert - Nonfood use Information provided by Eastman
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Physical Properties	Original Value	Comments

Density	0.815 - 0.818 g/cc
Viscosity	0.77 cP	Neat
	0.80 cP	Liquid
Molecular Weight	114.19 g/mol
Vapor Pressure	0.00282 atm @Temperature 20.0 °C
	0.0276 atm @Temperature 55.0 °C
Surface Tension	26.1 dynes/cm

Chemical Properties	Original Value	Comments
Critical Pressure	28.8 atm
Critical Temperature	338.3 °C

Thermal Properties	Original Value	Comments
CTE, linear	104 µm/m-°C
Melting Point	-33.0 °C	Freezing Point
Boiling Point	147 - 153 °C	@ 760 mm Hg
Flash Point	39.0 °C	Tag Open Cup

Optical Properties	Original Value	Comments
Refractive Index	1.406 - 1.409

Descriptive Properties
Color	PT-Co
Upper Limits for Trace Metals	10 ppb	Aluminum
	10 ppb	Barium
	10 ppb	Cadmium
	10 ppb	Calcium
	10 ppb	Chromium
	10 ppb	Cobalt
	10 ppb	Copper
	10 ppb	Gallium
	10 ppb	Germanium
	10 ppb	Iron
	10 ppb	Lead
	10 ppb	Lithium
	10 ppb	Magnesium
	10 ppb	Manganese
	10 ppb	Nickel
	10 ppb	Potassium
	10 ppb	Silver
	10 ppb	Sodium
	10 ppb	Strontium
	10 ppb	Titanium
	10 ppb	Zinc

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PEATM5145 / 222339

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