Greene Tweed CHEMRAZ® 513 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 513 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 513 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. This material offers excellent performance history in static plasma, photolithography and diffusion processes where temperature do not exceed 210°C (410°F) and high-sealing loads are not used. The hardness of this material allows for some hardware finish inconsistency Applications: Door seals Slit valves Window seals Isolator valve seals Lid seals Gas inlet seals KF fitting seals Information provided by Greene Tweed.
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Physical Properties	Metric	English	Comments

Specific Gravity	2.22 g/cc	2.22 g/cc	ASTM D297

Mechanical Properties	Metric	English	Comments
Hardness, Shore A	80	80	ASTM D2240
Tensile Strength at Break	11.0 MPa	1600 psi	ASTM D1414
Tensile Strength, Yield	3.72 MPa	540 psi	@ 50% Elongation; ASTM D1414
	7.24 MPa	1050 psi	@100% Elongation; ASTM D1414
Elongation at Break	165 %	165 %	ASTM D1414
Compression Set	25 % @Temperature 204 °C, Time 252000 sec	25 % @Temperature 400 °F, Time 70.0 hour	At 25% deflection; ASTM D395

Thermal Properties	Metric	English	Comments
Maximum Service Temperature, Air	210 °C	410 °F
Minimum Service Temperature, Air	-30.0 °C	-22.0 °F

Descriptive Properties
Color	White

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PGREEN03 / 42297

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