Tosoh ESL-1 Optical Silica Glass

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Tosoh ESL-1 Optical Silica Glass
Categories:	Ceramic; Glass
Material Notes:	ES ingots are manufactured from high-purity SiCl4 using an oxy-hydrogen flame in a verneuil type process. For very large parts, such as LCD photomasks, ES ingots are reflown into large rectangular blocks. ES ingots have a typical purity that exceeds the detection limit of 10ppb in all elements, and are virtually free of bubbles and inclusions. As a result, ES is the material of choice for LCD photomasks up to Gen. 10, and selected subgrades are widely used in leading edge stepper (KrF and ArF) and optics applications. Features: Standard optical grade for planar optics Application: : LCD Mask, Mirror & window substrate Information provided by Tosh Corporation
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Physical Properties	Original Value	Comments

Density	2.20 g/cc
Viscosity	11400 cP @Temperature 1200 °C

Mechanical Properties	Original Value	Comments
Hardness, Vickers	907.5
Tensile Strength	49.0 MPa
Modulus of Elasticity	74.0 GPa	Young's
Flexural Strength	65.0 - 95.0 MPa
Compressive Strength	1130 MPa
Poissons Ratio	0.18
Shear Modulus	31.0 GPa

Electrical Properties	Original Value	Comments
Volume Resistivity	1.00e+17 ohm-cm
Surface Resistance	5.00e+15 ohm
Dielectric Constant	3.9 @Frequency 5.00e+8 Hz
Dielectric Loss Index	<= 0.0010 @Frequency 5.00e+8 Hz

Thermal Properties	Original Value	Comments
CTE, linear	0.520 µm/m-°C @Temperature 30.0 - 100 °C
	0.580 µm/m-°C @Temperature 30.0 - 200 °C
Specific Heat Capacity	0.749 J/g-°C
Thermal Conductivity	1.38 W/m-K
Softening Point	1720 °C	(?=10^7.6)*2
Annealing Point	1080 °C	(?=10^13)
Strain Point	980 °C	(?=10^14.5)

Descriptive Properties
Applicable Wavelength	180-2100 nm
Bubble Class	Class O
Refractive Index Homogeneity	3-10	CA:F300mm
	5-15	CA:F500mm
Strain	1-10 nm/cm
Striae	1 direction free

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PTOSOH017 / 306472

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