Empirical formula: C7H18O3Si CAS No.: 2031-67-6 SEMICOSIL® M3E is Methyltriethoxysilane of high purity. Special features: - high purity
- low metal content
- low chloride content
Application: SEMICOSIL® M3E was developed for the semiconductor industry, e.g. as precursor for low dielectric constant interlayer dielectrics.Information provided by Wacker Chemie AG. |