| DuPont™ Vespel® CR-6110 shapes are carbon-fiber filled thermoplastic fluoropolymers that have demonstrated outstanding performance in aggressive wet chemical / plasma conditions and elevated temperatures. Customers report improved preventative maintenance cycles by switching to Vespel® CR-6110 in wafer cleaning and resist stripping operations. It has also demonstrated good ultraviolet (UV) resistance in Flat Panel Display applications. In dry plasma applications, Vespel® CR-6110 has been used as a thermal insulator and bearing. Vespel® CR-6110 is available upon request in wide variety of shapes (plaque, sheet, rod, ring, tube) and can also be machined for custom parts in various applications.Information provided by DuPont. This product line has remained with DuPont after the DuPont-Dow merger. |
