Greene Tweed CHEMRAZ® 639 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 639 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 639 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz 639 is developed from an advanced polymer utilizing fluoropolymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.), Chemraz 639 remains stable at service temperatures up to 260°C (500°F). Applications: Endpoint windows Bell jar seals Valve seals KF fitting seals Window seals Isolator valve seals Lid seals Gas inlet seals Slit valve seals Chamber seals Information provided by Greene Tweed.
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Physical Properties	Metric	English	Comments

Specific Gravity	2.07 g/cc	2.07 g/cc	ASTM D297

Mechanical Properties	Metric	English	Comments
Hardness, Shore A	80	80	ASTM D2240
Tensile Strength at Break	19.3 MPa	2800 psi	ASTM D1414
Tensile Strength, Yield	4.31 MPa	625 psi	@50% Elongation; ASTM D1414
	10.0 MPa	1450 psi	@100% Elongation; ASTM D1414
Elongation at Break	160 %	160 %	ASTM D1414
Compression Set	34 % @Temperature 204 °C, Time 252000 sec	34 % @Temperature 400 °F, Time 70.0 hour	At 25% deflection; ASTM D395

Thermal Properties	Metric	English	Comments
Maximum Service Temperature, Air	260 °C	500 °F
Minimum Service Temperature, Air	-20.0 °C	-4.00 °F

Descriptive Properties
Color	Translucent Ivory

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PGREEN27 / 42321

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