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Elmet Technologies
Brewer Science ProTEK® PSB Photosensitive Protective Coating
Categories: Other Engineering Material

Material Notes: ProTEK® PSB coating is a negative-working photosensitive alkaline-resistant etch mask that allows bulk silicon micromachining late in the device fabrication process while preserving the metal stack. It is applied as a primer and then a protective coating in a spin coating process.

Benefits:

  • Apply over CMOS structures at low process temperatures
  • Shorten processing time compared to SiN etch masks
  • Provide higher throughput than single-wafer deep reactive ion etching by using batch processing

Information provided by Brewer Science.

Vendors:
Available Properties
  • Thickness, Spin Speed 4000 rpm
  • Thickness, Spin Speed 700 rpm
  • Shelf Life, Primer
  • Shelf Life, Coating
  
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