Eastman EastaPure™ MAK

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Eastman EastaPure™ MAK
Categories:	Other Engineering Material
Material Notes:	CAS No. 110-43-0 Product Description: Eastman EastaPure™ MAK (Methyl n-Amyl Ketone) is being offered for positive and negative photoresist formulations. It has a minimum assay of 99.0%. It is a high-purity low-trace metal solvent and is tested to measure selected critical trace metals in parts-per-billion levels. EastaPure™ MAK can also be used in edge bead removal process after spin coating. The chemical substances for this product are listed as Inert Ingredients Permitted for Use in Nonfood Use Pesticide Products, and in Food Use Pesticide Products with limitations, under the Federal Insecticide, Fungicide, and Rodenticide Act (FIFRA). Application/Uses: Advanced resist Developers Edge bead removal LED/OLED Microelectronics Negative tone resist Photolithography Photoresist Photoresist stripper applications Positive tone resist Semiconductors Key Attributes: Excellent resin solubility High assay High Purity/Low Trace Metals Inert - Food use with limitations Inert - Nonfood use Information provided by Eastman
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Physical Properties	Metric	English	Comments

Density	0.815 - 0.818 g/cc	0.0294 - 0.0296 lb/in³
Viscosity	0.77 cP	0.77 cP	Neat
	0.80 cP	0.80 cP	Liquid
Molecular Weight	114.19 g/mol	114.19 g/mol
Vapor Pressure	0.00286 bar @Temperature 20.0 °C	2.14 torr @Temperature 68.0 °F
	0.0280 bar @Temperature 55.0 °C	21.0 torr @Temperature 131 °F
Surface Tension	26.1 dynes/cm	26.1 dynes/cm

Chemical Properties	Metric	English	Comments
Critical Pressure	29.2 bar	21900 torr
Critical Temperature	338.3 °C	640.9 °F

Thermal Properties	Metric	English	Comments
CTE, linear	104 µm/m-°C	57.8 µin/in-°F
Melting Point	-33.0 °C	-27.4 °F	Freezing Point
Boiling Point	147 - 153 °C	297 - 307 °F	@ 760 mm Hg
Flash Point	39.0 °C	102 °F	Tag Open Cup

Optical Properties	Metric	English	Comments
Refractive Index	1.406 - 1.409	1.406 - 1.409

Descriptive Properties
Color	PT-Co
Upper Limits for Trace Metals	10 ppb		Aluminum
	10 ppb		Barium
	10 ppb		Cadmium
	10 ppb		Calcium
	10 ppb		Chromium
	10 ppb		Cobalt
	10 ppb		Copper
	10 ppb		Gallium
	10 ppb		Germanium
	10 ppb		Iron
	10 ppb		Lead
	10 ppb		Lithium
	10 ppb		Magnesium
	10 ppb		Manganese
	10 ppb		Nickel
	10 ppb		Potassium
	10 ppb		Silver
	10 ppb		Sodium
	10 ppb		Strontium
	10 ppb		Titanium
	10 ppb		Zinc

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PEATM5145 / 222339

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