Greene Tweed CHEMRAZ® 520 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 520 Perfluoroelastomer
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	Chemraz® 520 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contaminations is required. Additionally, Chemraz 520 offers excellent performance history in static and dynamic plasma and diffusion processes as well as static photolithography processes. Chemraz 520 is formulated for use in high sealing load applications and where temperatures do not exceed 240°C (464°F). Due to the hardness of this material, low-temperature applications may require smoother hardware surface finishes of 10 micro inches (Ra) and below. Applications: Door seals Slit valves Isolator valve seats Lid Seals Gas inlet seals KF fitting seals Information provided by Greene Tweed.
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Physical Properties	Metric	English	Comments

Specific Gravity	2.10 g/cc	2.10 g/cc	ASTM D297

Mechanical Properties	Metric	English	Comments
Hardness, Shore A	90	90	ASTM D2240
Tensile Strength at Break	13.4 MPa	1950 psi	ASTM D1414
Tensile Strength, Yield	6.83 MPa	990 psi	@ 50% Elongation; ASTM D1414
	12.3 MPa	1780 psi	@100% Elongation; ASTM D1414
Elongation at Break	110 %	110 %	ASTM D1414
Compression Set	35 % @Temperature 204 °C, Time 252000 sec	35 % @Temperature 400 °F, Time 70.0 hour	At 25% deflection; ASTM D395

Thermal Properties	Metric	English	Comments
Maximum Service Temperature, Air	240 °C	464 °F
Minimum Service Temperature, Air	-30.0 °C	-22.0 °F

Descriptive Properties
Color	White

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PGREEN06 / 42300

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