| The ACCUGLASS P-TTY Spin-on Glass (SOG) Series (κ = 4.1-4.3) is a family of phosphosilicate polymers used for metal and poly planarization, overcoat passivation and non-etchback interlayer dielectric in the manufacture of integrated circuits. The ACCUGLASS P-TTY series also provides Na+ gettering ability similar to P-doped CVD oxides. The ACCUGLASS P-TTY series contains 2wt% (P-112A), 2.7wt% (P-112LS) and 4wt% (P-114A) phosphorous bonded to O atoms in the Si-O backbone. The spec-ific formulation results in a stable dielectric constant, <2% within wafer uniformity and can be densified at temperatures up to 700-900°C with no significant loss of phosphorous. Thin films of ACCUGLASS P-TTY are applied using a commercial coater and cured in a vertical or horizontal furnace to thicknesses up to 1000Å (single coat) and 2000Å (double coat). Typically, two coats at ~1,000Å each are applied with hot plate bakes in between coats to achieve optimum planarization. Benefits - Industry proven performance and broad acceptance in subtractive aluminum processing
- Phosphorus stability up to 900°C
- Thickness variation within a wafer of less than 2%
- P-112Ls has similar etch properties as BPSG
Applications:- PMD-BPSG Planarization
- Overcoat Passivation
- ILD Planarization
- Available in both Etchback and Non-Etchback
Accuglass P-TTY is suitable for metal and poly planarization, partial and non-etchback applications in a CVD/SOG/CVD sandwich structure. ACCUGLASS P-TTY can also be used for overcoat passivation.Information provided by Honeywell |
