Elemental Fluorine (F2) is used to clean CVD tools from deposition within the chamber, which was caused by the CVD process. Fluorine: CAS-No.: 7782-41-4 / EC-No.: 231-954-8 / Index-No.: 009-001-00-0 Hydrogen fluoride: CAS-No.: 7664-39-3 / EC-No.: 231-634-8 / Index-No.: 009-003-00-1 Uses: Automotive industry, Plastic industry and Chemical industry Information provided by Solvay |