| Kalrez® Sahara™ 8575 is specially formulated for improved performance in etching, ashing and stripping processes, offers lower cost of ownership with reduced contamination and longer seal life. This white perfluoroelastomer compound utilizes a new proprietary polymer and crosslinking system. It offers reduced weight loss, particle generation and outgassing, as well as improved elastic recovery properties. Kalrez® Sahara™ 8575 exhibits excellent resistance to both oxygen and fluorine plasma as well as chlorinated cleaning gasses (e.g., CIF3). It has excellent vacuum and long-term sealing performance, good mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., gas inlets, chamber lids, slit valve doors, etc.). A maximum continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is standard for all parts made of Kalrez® Sahara™ 8575. Information provided by manufacturer. |
