DuPont Mobility and Materials Kalrez® 9100 Fluoroelastomer

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DuPont Mobility and Materials Kalrez® 9100 Fluoroelastomer (Unverified Data**)
Categories:	Polymer; Thermoset; Fluoropolymer, TS; Thermoset Fluoroelastomer; Rubber or Thermoset Elastomer (TSE)
Material Notes:	DuPont™ Kalrez® 9100 is an amber translucent product targeted specifically for PECVD and HDPCVD processes. It has also exhibited excellent performance in "select" etch processes. Kalrez® 9100 has been specifically designed for low erosion and ultra-low particle generation in harsh plasma environments. It offers excellent thermal stability, very low outgassing as well as excellent elastic recovery and good mechanical strength properties and is well suited for both static and “select” dynamic sealing applications*. A maximum continuous service temperature of 300 °C is suggested. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9100 parts. Features/Benefits Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasmas Excellent resistance to dry process chemistry Excellent thermal stability Very low outgassing properties and metals content Excellent elastic recovery and low compression set properties Suggested Applications Gas inlet/orifice seals Chamber lid seals Isolation valve seals “Select” bonded gate valves/slit valve door F181 seals
Vendors:

Available Properties
Hardness, Shore A, ASTM D2240, Plied slab Hardness, Shore M, ASTM D1414, ASTM D2240, O-ring Tensile Strength at Break, ASTM D412 Elongation at Break, ASTM D412 100% Modulus, ASTM D412 Compression Set, ASTM D1414 and ASTM D395B Compression Set, ASTM D1414 and ASTM D395B Compression Set, ASTM D1414 and ASTM D395B Maximum Service Temperature, Air, DuPont Test Method

Property Data

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Manufacturer Notes:
DuPont Performance Polymers (Former DuPont Elastomers)

Category Notes
Plastic

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