Sulphur Hexafluoride (SF6) is used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). CAS-No.: 2551-62-4 / EC-No.: 219-854-2 / REACH Registration Number: 01-2119458769-17 Uses: Electrical industry and Metallurgy Information provided by Solvay |