Materion ZAO (AZO) High Performance Al-doped Zn Oxide Coating

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Materion ZAO (AZO) High Performance Al-doped Zn Oxide Coating
Categories:	Ceramic; Oxide
Material Notes:	Sputtering of Al-doped Zn oxide as dielectric, Ag-seed layer, or TCO from a ceramic target material has become widely accepted in the industry. Materion offers high quality, innovative ZAO rotatable targets that can significantly reduce production costs for our customers. Our thermally sprayed ZAO rotatables increase target utilization thus saving raw materials costs. Due to their unparalleled sputter process stability, they enable highest homogeneity and enhanced layer properties of Al-doped Zn oxide coatings. Benefits Better sputter performance: No hard arcs; Almost no microarcing Greatly improved sputter yield up to 90% Reduced cost per kg No bonding gaps ? strongly reduced arcing and no pollution issues out of gaps No risk of sleeves from mixed lots ? improved film performance and homogeneity Application: TCO/seed layer, front/back contact Information provided by Materion.
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Thermal Properties	Original Value	Comments

CTE, linear	2.78 µin/in-°F
Thermal Conductivity	25.0 W/m-K
Melting Point	1800 °C

Component Elements Properties	Original Value	Comments
Calcium, Ca	<= 0.00500 %	<50 ppm
Chromium, Cr	<= 0.00100 %	<10 ppm
Cobalt, Co	<= 0.00100 %	<10 ppm
Copper, Cu	<= 0.00100 %	<10 ppm
Iron, Fe	<= 0.00200 %	<20 ppm
Magnesium, Mg	<= 0.00500 %	<50 ppm
Nickel, Ni	<= 0.00200 %	<20 ppm
Silicon, Si	<= 0.0120 %	<120 ppm

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CMATER916 / 323622

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