Materion Titanium Oxide (TiOx) Rotatable Sputtering Target for Glass Applications

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Materion Titanium Oxide (TiOx) Rotatable Sputtering Target for Glass Applications
Categories:	Ceramic; Oxide; Titanium Oxide
Material Notes:	Materion is a leading supplier of rotatable sputtering targets for large area glass coatings. Our high purity Titanium Oxide (TiOx) sputtering targets are specifically developed to produce low defect and high performance thin films. Benefits Special target geometry provides greater material utilization Longer target life time reduces downtime for change outs and chamber maintenance Pure TiOx with optimized microstructure for best homogeneity and sputtering performance on full target volume Customized x-value possible Custom designed special geometries available Application: Glass, dielectric base layer, blocker layer Information provided by Materion.
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Physical Properties	Metric	English	Comments

Density	>= 4.00 g/cc	>= 0.145 lb/in³

Electrical Properties	Metric	English	Comments
Electrical Resistivity	0.190 ohm-cm	0.190 ohm-cm

Thermal Properties	Metric	English	Comments
CTE, linear	7.90 µm/m-°C	4.39 µin/in-°F
Thermal Conductivity	3.00 W/m-K	20.8 BTU-in/hr-ft²-°F
Melting Point	1800 °C	3270 °F

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CMATER912 / 323565

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